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Last update: Novotný Michal Ing. Bc. Ph.D. (28.06.2018)
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Last update: Novotný Michal Ing. Bc. Ph.D. (27.08.2018)
Students will be familiar with technologies and methods used for preparation of thin films. They will have overview of diagnostic methods to analyze morphology, physical, physical-chemical and chemical properties. They will be able to choose optimal techniques and methods to fabricate and characterize thin films regarding the material nature. |
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Last update: Vlček Jan Ing. Ph.D. (30.08.2019)
Z: 1. Hans Lüth: Solid Surfaces, Interfaces and Thin Films, Springer International Publishing, 2014 2. Donald L. Smith: Thin-Film Deposition: Principles and Practice, McGraw Hill Professional, 1995 3. Frank L., Král J.: Metody analýzy povrchů – iontové, sondové a speciální metody, Academia, Praha, 2002 4. Ohring M.: Materials Science of Thin Films. Academic Press, San Diego 2002 5. Hoffman D., Singh B., Thomas J. H.: Handbook of Vacuum Science and Technology. Academic Press, San Diego 1998.
D: 1. Heide P.: X-RAY PHOTOELECTRON SPECTROSCOPY, An Introduction to Principles and Practices, Wiley, 2012 |
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Last update: Novotný Michal Ing. Bc. Ph.D. (27.08.2018)
The lectures posted on the web pages of the Institute of physics and measurements |
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Last update: Novotný Michal Ing. Bc. Ph.D. (27.08.2018)
none |
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Last update: Novotný Michal Ing. Bc. Ph.D. (27.08.2018)
1. Basic characteristics of thin films and nanostructures, classification, properties 2. Thin film growth mechanisms, nucleation, coalescence, substrate 3. Polycrystalline, monocrystalline and amorphous thin films, epitaxy 4. Vacuum techniques in HV, UHV and XHV range 5. Physical vapor deposition (PVD), evaporation, sputtering, PLD, ALD 6. Chemical vapor deposition (CVD) and non-vacuum techniques of preparation of thin films 7. Morphology analyses – scanning probe microscopy (AFM, KPFM, STM) 8. Structure and morphology analyses – TEM, SEM, SAED, LEED, RHEED 9. X-ray and neutron diffraction and scattering (PXRD, GIXRD, GAXRD, SAXS, GISAXS, SANS, GISANS) 10. Ion spectroscopies (SIMS, HEIS, RBS, EBS) 11. Structure and composition analyses – Raman and IR spectroscopies, EDX, NMR, EPR 12. Photoelectron spectroscopy and microscopy (XPS, PEEM) 13. Electrotransport properties – four-point technique and Hall 14. Optical properties - ellipsometry, spectrophotometry, spectroscopy - UV-VIS |
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Last update: Novotný Michal Ing. Bc. Ph.D. (27.08.2018)
none |
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Last update: Novotný Michal Ing. Bc. Ph.D. (27.08.2018)
none |
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Last update: Novotný Michal Ing. Bc. Ph.D. (27.08.2018)
oral examination |
Coursework assessment | |
Form | Significance |
Oral examination | 100 |