SubjectsSubjects(version: 955)
Course, academic year 2023/2024
Technology of Thin Layers and Sensors - B444010
Title: Technologie a vlastnosti tenkých vrstev, tenkovrstvé sensory
Guaranteed by: Department of Physics and Measurement (444)
Faculty: Faculty of Chemical Engineering
Actual: from 2023
Semester: winter
Points: winter s.:6
E-Credits: winter s.:6
Examination process: winter s.:
Hours per week, examination: winter s.:3/1, C+Ex [HT]
Capacity: unknown / unknown (unknown)
Min. number of students: unlimited
State of the course: taught
Language: Czech
Teaching methods: full-time
Teaching methods: full-time
Is provided by: M444013
Note: course can be enrolled in outside the study plan
enabled for web enrollment
Guarantor: Vrňata Martin prof. Dr. Ing.
Interchangeability : N444028
This subject contains the following additional online materials
Annotation -
The course covers two areas: (i) introduces students to the technologies of thin nanostructured layers preparation by vacuum or "wet" technologies and then to the vertical and horizontal patterning of these layers, (ii) demonstrates the use of such layers in sensors depending on their electrophysical and optical parameters.
Last update: Fialová Jana (15.01.2018)
Aim of the course -

Students will be able to:

orientate themselves in technologies for development and structuring of micro-and nano-layers

apply prepared layers in sensors (depending on their electrophysical and optical properties)

Last update: Fialová Jana (15.01.2018)
Literature -

R: W.A. Goddard, D.W.Brenner, S.E. Lyshevski, G.J. Iafrate (eds.): Handbook of Nanoscience, Engineering and Technology, CRC Press 2007, ISBN 0-8493-7563-0

A: I. Hüttel: Technologie materiálů pro elektroniku a optoelektroniku, skripta VŠCHT Praha, 2000

A: M. LIBRA: Vakuum - technologie moderní doby. ELEKTRO, 2003

Last update: Fialová Jana (15.01.2018)
Learning resources -

Lectures in electronic format published on the website of the Department of Physics and Measurements ICT Prague

Last update: Fialová Jana (15.01.2018)
Syllabus -

1. Micro-and nano: perspectives, properties (effect of composition, structure, thickness, technology)

2. Introduction to vacuum technology, vacuum, mean free path, vacuum evaporation

3. Cathode sputtering (LED, low, high), thickness measurement

4. Magnetron, and reactive ion sputtering, nanolayers, ion implantation

5. CVD, PVD, PECVD, MOVPE, MBE, coating technologies (spin-, spray-, dip-)

6. Laser deposition methods, interaction of radiation, PLD, MAPLD, MAPLD-DW, MAPLD-RIR

7. Lithography, lithographic mask, positive and negative resist, the method of direct writing

8. Optical properties, anti-reflective coating, interference, holography, ellipsometry, waveguides

9. Conductivity gas sensors, principle and applications, comparison with conventional analyzers

10. Semiconductor materials for sensors, the influence of dopants and vacancies, Schottky transition

11. Thin-film conductivity sensor, electronic scheme, Debye length, interaction with gases

12. Preparation of thin films by ink-jet technology, mechanisms of depositions, ink-jet printers

13. Microsensors prepared by ink-jet technology, multistructures, printed electronic noses

14. Thin film sensors based QCM, description of resonance, Sauerbrey equation


Excursion to the Institute of Physics ASCR, examples of high-tech equipment

Last update: Fialová Jana (15.01.2018)
Registration requirements -

Physical Chemistry

Last update: Fialová Jana (15.01.2018)
Teaching methods
Activity Credits Hours
Konzultace s vyučujícími 1 28
Účast v laboratořích (na exkurzi nebo praxi) 0.5 14
Účast na přednáškách 1.5 42
Příprava na přednášky, semináře, laboratoře, exkurzi nebo praxi 0.5 14
Příprava na zkoušku a její absolvování 2 56
6 / 6 154 / 168