SubjectsSubjects(version: 947)
Course, academic year 2023/2024
Technology of Thin Layers and Sensors - N444028
Title: Technologie a vlastnosti tenkých vrstev, tenkovrstvé sensory
Guaranteed by: Department of Physics and Measurement (444)
Faculty: Faculty of Chemical Engineering
Actual: from 2021
Semester: winter
Points: winter s.:6
E-Credits: winter s.:6
Examination process: winter s.:
Hours per week, examination: winter s.:3/1, C+Ex [HT]
Capacity: unknown / unknown (unknown)
Min. number of students: unlimited
Language: Czech
Teaching methods: full-time
Teaching methods: full-time
Is provided by: M444013
For type:  
Guarantor: Vrňata Martin prof. Dr. Ing.
Fitl Přemysl Ing. Ph.D.
Vlček Jan Ing. Ph.D.
Is interchangeable with: B444010
Examination dates   Schedule   
Annotation -
Last update: Kopecký Dušan doc. Ing. Ph.D. (02.07.2013)
The course covers two areas: (i) introduces students to the technologies of thin nanostructured layers preparation by vacuum or "wet" technologies and then to the vertical and horizontal patterning of these layers, (ii) demonstrates the use of such layers in sensors depending on their electrophysical and optical parameters.
Aim of the course -
Last update: Kopecký Dušan doc. Ing. Ph.D. (02.07.2013)

Students will be able to:

orientate themselves in technologies for development and structuring of micro-and nano-layers

apply prepared layers in sensors (depending on their electrophysical and optical properties)

Literature -
Last update: Fialová Jana (26.09.2013)

R: W.A. Goddard, D.W.Brenner, S.E. Lyshevski, G.J. Iafrate (eds.): Handbook of Nanoscience, Engineering and Technology, CRC Press 2007, ISBN 0-8493-7563-0

A: I. Hüttel: Technologie materiálů pro elektroniku a optoelektroniku, skripta VŠCHT Praha, 2000

A: M. LIBRA: Vakuum - technologie moderní doby. ELEKTRO, 2003

Learning resources -
Last update: Kopecký Dušan doc. Ing. Ph.D. (02.07.2013)

Lectures in electronic format published on the website of the Department of Physics and Measurements ICT Prague

Syllabus -
Last update: Kopecký Dušan doc. Ing. Ph.D. (02.07.2013)

1. Micro-and nano: perspectives, properties (effect of composition, structure, thickness, technology)

2. Introduction to vacuum technology, vacuum, mean free path, vacuum evaporation

3. Cathode sputtering (LED, low, high), thickness measurement

4. Magnetron, and reactive ion sputtering, nanolayers, ion implantation

5. CVD, PVD, PECVD, MOVPE, MBE, coating technologies (spin-, spray-, dip-)

6. Laser deposition methods, interaction of radiation, PLD, MAPLD, MAPLD-DW, MAPLD-RIR

7. Lithography, lithographic mask, positive and negative resist, the method of direct writing

8. Optical properties, anti-reflective coating, interference, holography, ellipsometry, waveguides

9. Conductivity gas sensors, principle and applications, comparison with conventional analyzers

10. Semiconductor materials for sensors, the influence of dopants and vacancies, Schottky transition

11. Thin-film conductivity sensor, electronic scheme, Debye length, interaction with gases

12. Preparation of thin films by ink-jet technology, mechanisms of depositions, ink-jet printers

13. Microsensors prepared by ink-jet technology, multistructures, printed electronic noses

14. Thin film sensors based QCM, description of resonance, Sauerbrey equation


Excursion to the Institute of Physics ASCR, examples of high-tech equipment

Registration requirements -
Last update: Kopecký Dušan doc. Ing. Ph.D. (02.07.2013)

Physical Chemistry

Teaching methods
Activity Credits Hours
Konzultace s vyučujícími 1 28
Účast v laboratořích (na exkurzi nebo praxi) 0.5 14
Účast na přednáškách 1.5 42
Příprava na přednášky, semináře, laboratoře, exkurzi nebo praxi 0.5 14
Příprava na zkoušku a její absolvování 2 56
6 / 6 154 / 168
Coursework assessment
Form Significance
Regular attendance 20
Examination test 40
Oral examination 40